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Refurbishment
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Refurbishment
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This can be done when the software is delivered by the customer.
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100+ Systems
Experienced
500+ Chambers
Experienced
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1. Inspection
a. missing parts
b. broken parts
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2. Disassemble
a. all chamber / robots / other moving parts
b. all gas lines
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3. Cleaning / Overhaul
a. all chamber / pump / robots / other moving parts
b. all gas lines
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4. Assemble / Rebuild
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5. Function Test
a. Vacuum / Gauge
b. Moving parts / Robots operation, calibration
c. Heater, Bake lamp
d. RF / DC Power
e. .........
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6. Transport / Shipping