100+ Systems
Experienced
500+ Chambers
Experienced
1. Inspection
a. missing parts
b. broken parts
2. Disassemble
a. all chamber / robots / other moving parts
b. all gas lines
3. Cleaning / Overhaul
a. all chamber / pump / robots / other moving parts
b. all gas lines
4. Assemble / Rebuild
5. Function Test
a. Vacuum / Gauge
b. Moving parts / Robots operation, calibration
c. Heater, Bake lamp
d. RF / DC Power
e. .........
6. Transport / Shipping
